refers to EC norm testing concerning repeatability of results of any device The CATEX+ metrology testing is to EN 50054, EN 50057 and EN 50058 EN 50054 covers the general principles and the methods for testing electrical instruments for the detection and measurement of flammable gases The standards EN 50057 and EN 50058 cover the performance requirements for instruments belonging to Group II (with a measurement range up to 100% of the LEL scale and up to 100% of the volume gas scale)
The science of measurement, in semiconductor industry typical measurements include: CD, overlay, film thickness
documented control that all equipment is suitably calibrated and maintained in order to perform as intended and to give confidence in reliable results
Process of making extremely precise measurements of the relative positions and orientations of the different optical and mechanical components
Science of measurement. Measuring a quantity means establishing its ratio to another fixed quantity of the same kind, known as the unit of that kind of quantity. A unit is an abstract idea, defined either by reference to a randomly chosen material standard or to a natural phenomenon. For example, the metre, the standard of length in the metric system, was formerly defined (1889-1960) by the separation of two lines on a particular metal bar, but it is now defined as the distance traveled by light in a vacuum in 1/299,792,458 second. See also International System of Units
metrology
Hyphenation
me·tro·lo·gy
Pronunciation
Etymology
[ me-'trä-l&-jE ] (noun.) 1816. From Ancient Greek μέτρον (metron, “measure”) + -logy.